Caractérisation mécanique des films minces

Mechanical characterization of thin films. II: Normal indentation test

CEMEF - École Nationale Supérieure des Mines de Paris

Abstract

After reviewing the different method of mechanical characterization of thin films, we now deal with the normal indentation test. During this test, in opposition to the others tests, the material indented is under elastoplastic deformations. For this, this method is very interesting and very difficult to interpretate.

Afetr a bibliographic review of the indentation test, results obtained by all the methods explained in the two papers are discussed.