Les revêtements à partir de la phase gazeuse

Péchiney Ugine Kuhlmann, Paris

Abstract

Brief survey of the industrial situation of chemical vapour deposition (CVD) and physical vapour deposition (PVD) processes, increasingly used for protection of metal parts against wear and corrosion and for surface modification.

— CVD : reactions used ; advantages and drawbacks of the process ; applications in mandrel forming and in deposition of metals and refractory compounds.

— PVD : description of the various methods : thermal evaporation, sputtering, ion plating and their extension to reactive conditions. Comparison and advantages of these processes which are gaining importance in the same applications as those developped with CVD, mainly because of the low temperatures of the substrat involved.