CVD : Des revêtements submicroniques à l'obtention de pièces massives

Responsable Recherche et Développement, société Comurhex

Abstract

The industrial applications for chemical vapor déposition have increased rapidly during the past decade, particularly in the electronic, médical, aerospace, defence and nuclear markets. This technology may now have reached maturity in certain fields ; however, variations in the technique have been investigated and developped to supply specific coating requirements.

Comurhex has developped a considérable expertise in L.P.C. V.D. (low pressure chemical vapor deposition) of metals and ceramic coatings.

Refractory metals or alloys such as tungsten, tungsten-rhenium, iridium, molybdenum and niobium are currently fabricated either as coatings on various substrates or as massive pieces with thickness as much as 20 mm.

A wide range of ceramic coatings are also available for différent applications, e.g., protection against wear, corrosion, oxidation at high temperatures and chemical attack. Finally, Comurhex has investigated and developped infiltration of certain metals and cera- mics into woven structures (2D and 3D) and fibrous materials for the fabrication of cera- mic and metal matrix composites.