Piezoelectric properties of lead zirconate titanate films prepared by chemical solution deposition process

Smart Structure Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba central 2, 1-1-1 Umezono, Tsukuba 305-8568, Japan E-mail : Iijima-t@ aist.go.jp

Abstract

An AFM probing system was connected with aferroelectric test system to measure the longitudinal displacementproperties of lead zirconate titanate (PZT) films with a large AC drive signal at 5 Hz. One of the benefits of this measuring system is considered to be dynamic evaluation of longitudinal displacement and direct comparison of the ferroelectric and piezoelectric property. PZT films were prepared by chemical solution deposition method, and the film thickness was about 1.2 μm. When decreasing the PZT film top electrode diameter from 500 to 30 pm, the longitudinal displacement direction changes from negative to positive because the longitudinal piezoelectric effectbecomes dominant. The longitudinal piezoelectric constant measured with unipolar signal (+5 V, 5 Hz) was d₃₃ =108 pm/V for 30 μm-dia top electrode.