Matériaux & Techniques

Nanoindentation du Si₃N₄ pour la microelectronique : influence de la sous-couche

Rosine Coq Germanicus, Sophie Eve, Florent Lallemand and Eric Hug

Matériaux & Techniques, 103 6 (2015) 606

Published online: 23 December 2015

DOI: 10.1051/mattech/2015052

Rosine Coq Germanicus

Sophie Eve

Florent Lallemand

Eric Hug

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