Matériaux & Techniques
Volume 107, Number 3, 2019
Recent progress in glass science and technology
|Number of page(s)||6|
|Published online||03 July 2019|
Laser-induced modification of amorphous GST225 phase change materials
Kurnakov Institute of General and Inorganic Chemistry, RAS,
2 National Research Tomsk State University, 634050 Tomsk, Russia
3 National Research University of Electronic Technology, 124498 Zelenograd, Russia
4 Ryazan State Radio Engineering University, 390005 Ryazan, Russia
5 I.M. Sechenov First Moscow State Medical University, 119991 Moscow, Russia
* e-mail: email@example.com
Accepted: 28 January 2019
In this paper, we have studied the crystallization behavior of amorphous GST225 thin films upon irradiation with nanosecond laser pulses. Crystalline and melt-quenched amorphous regions were produced by exposure to laser single or multipulses, and were characterized by the optical microscopy and by the micro-Raman spectroscopy. Transition region between the amorphous and crystalline parts of the laser-modified area was investigated by atomic force microscopy. Using irradiation by single laser pulses with varying fluence, it was verified that crystallization was possible if the fluence is more than 90.4 mJ/cm2.
Key words: phase change material / GST225 / nanosecond pulse laser / crystallization / reamorphization
© EDP Sciences, 2019
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