| Issue |
Matériaux & Techniques
Volume 107, Number 3, 2019
Recent progress in glass science and technology
|
|
|---|---|---|
| Article Number | 307 | |
| Number of page(s) | 6 | |
| DOI | https://doi.org/10.1051/mattech/2019008 | |
| Published online | 03 July 2019 | |
Regular Article
Laser-induced modification of amorphous GST225 phase change materials
1
Kurnakov Institute of General and Inorganic Chemistry, RAS,
119991
Moscow, Russia
2
National Research Tomsk State University,
634050
Tomsk, Russia
3
National Research University of Electronic Technology,
124498
Zelenograd, Russia
4
Ryazan State Radio Engineering University,
390005
Ryazan, Russia
5
I.M. Sechenov First Moscow State Medical University,
119991
Moscow, Russia
* e-mail: lpi@org.miet.ru
Received:
14
September
2018
Accepted:
28
January
2019
In this paper, we have studied the crystallization behavior of amorphous GST225 thin films upon irradiation with nanosecond laser pulses. Crystalline and melt-quenched amorphous regions were produced by exposure to laser single or multipulses, and were characterized by the optical microscopy and by the micro-Raman spectroscopy. Transition region between the amorphous and crystalline parts of the laser-modified area was investigated by atomic force microscopy. Using irradiation by single laser pulses with varying fluence, it was verified that crystallization was possible if the fluence is more than 90.4 mJ/cm2.
Key words: phase change material / GST225 / nanosecond pulse laser / crystallization / reamorphization
© EDP Sciences, 2019
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