Matériaux & Techniques
Volume 84, Number 9-10, 1996
|Page(s)||33 - 37|
|Published online||13 April 2017|
Caractérisation mécanique des films minces
Mechanical characterization of thin films. I : literature review
CEMEF - École Nationale Supérieure des Mines de Paris
The extensive use of thin films in the manufacture of microelectronic devices and for protection against wear and corrosion has stimulated considerable interest in their mechanical properties. This kind of study requires the development and use of non-traditional mechanical testing techniques. The most widely used testing methods of free standing films and of films adherent to their substrates are reviewed with an emphasis on their strengths and liabilities. Results obtained by these methods are discussed.
© SIRPE 1996
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